JPH071788Y2 - プラズマ装置 - Google Patents

プラズマ装置

Info

Publication number
JPH071788Y2
JPH071788Y2 JP1987171477U JP17147787U JPH071788Y2 JP H071788 Y2 JPH071788 Y2 JP H071788Y2 JP 1987171477 U JP1987171477 U JP 1987171477U JP 17147787 U JP17147787 U JP 17147787U JP H071788 Y2 JPH071788 Y2 JP H071788Y2
Authority
JP
Japan
Prior art keywords
plasma
sample
chamber
extraction window
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987171477U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0176029U (en]
Inventor
眞志 田野
建次郎 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP1987171477U priority Critical patent/JPH071788Y2/ja
Publication of JPH0176029U publication Critical patent/JPH0176029U/ja
Application granted granted Critical
Publication of JPH071788Y2 publication Critical patent/JPH071788Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987171477U 1987-11-10 1987-11-10 プラズマ装置 Expired - Lifetime JPH071788Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987171477U JPH071788Y2 (ja) 1987-11-10 1987-11-10 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987171477U JPH071788Y2 (ja) 1987-11-10 1987-11-10 プラズマ装置

Publications (2)

Publication Number Publication Date
JPH0176029U JPH0176029U (en]) 1989-05-23
JPH071788Y2 true JPH071788Y2 (ja) 1995-01-18

Family

ID=31463345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987171477U Expired - Lifetime JPH071788Y2 (ja) 1987-11-10 1987-11-10 プラズマ装置

Country Status (1)

Country Link
JP (1) JPH071788Y2 (en])

Also Published As

Publication number Publication date
JPH0176029U (en]) 1989-05-23

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